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                                                                                                                                                        SU1510
                                                                                                                                                        SU1510
                                                                                                                                                        产品概述:
                                                                                                                                                        Standard specifications(1) BasicspecificationsSE image resolution : 3.0 nm at 30 kV(x100,000, WD = 5 mm, High Vacuum Mode)15 nm at 3 kV ( x30,000, WD = 5 mm, Hi…
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                                                                                                                                                        详细介绍

                                                                                                                                                        SU1510

                                                                                                                                                        Standard specifications

                                                                                                                                                         

                                                                                                                                                        (1)  Basicspecifications

                                                                                                                                                        SE image resolution   : 3.0 nm at 30 kV(x100,000, WD = 5 mm, High Vacuum Mode)
                                                                                                                                                        15 nm at 3 kV ( x30,000, WD = 5 mm, High Vacuum Mode)

                                                                                                                                                        BSE image resolution  : 4.0 nm at 30 kV ( x60,000, WD = 5 mm, 6 Pa in Low Vacuum Mode )

                                                                                                                                                        Magnification         : ′5– 300,000
                                                                                                                                                        (Highest and lowest magnifications are dependent upon accelerating voltage, WDand scan speed)

                                                                                                                                                         

                                                                                                                                                        (2)  ElectronOptics

                                                                                                                                                        Electron beam source  : Pre-centered Cartridge filament ( Tungsten hair-pin filament)

                                                                                                                                                        Accelerating voltage  : 0.3 kV – 30 kV

                                                                                                                                                        Gun bias              :Quadrant Bias

                                                                                                                                                        Beam alignment        : 2-stage electromagnetic deflection (works as beam blankingwhen an image is freezed)

                                                                                                                                                        Lens system           :3-stage electromagnetic lens reduction optics

                                                                                                                                                        Stigmator             :X-Y octopole electromagnetic

                                                                                                                                                        Scanning coil         : 2-stage electromagnetic deflection

                                                                                                                                                        Objective movable aperture: 4 holes withclick-stop design (30, 50, 80, 150 μm dia.)

                                                                                                                                                        Image shift           :±50 μm or larger at WD = 15 mm

                                                                                                                                                        Analysis position     : WD = 15 mm, TOA = 35°

                                                                                                                                                        Detectors             :SE detector in High vacuum mode
                                                                                                                                                        BSE detector in high and low vacuum modes

                                                                                                                                                         


                                                                                                                                                        (3)  Specimenstage

                                                                                                                                                         

                                                                                                                                                        X

                                                                                                                                                        0 – 80 mm

                                                                                                                                                        Y

                                                                                                                                                        0 – 40 mm

                                                                                                                                                        Z

                                                                                                                                                        5 – 50 mm

                                                                                                                                                        R

                                                                                                                                                        360°

                                                                                                                                                        T

                                                                                                                                                        -20° - +90°

                                                                                                                                                        Control

                                                                                                                                                        5-axis manual

                                                                                                                                                        Maximum size

                                                                                                                                                        153 mm in diameter

                                                                                                                                                        Observable area

                                                                                                                                                        126 mm dia. with XYR

                                                                                                                                                        Maximum height

                                                                                                                                                        60 mm at WD = 15 mm

                                                                                                                                                        Others

                                                                                                                                                        2-axis stage Motor drive unit (option)

                                                                                                                                                         

                                                                                                                                                        (4)  Evacuationsystem

                                                                                                                                                        Evacuation control    : Fully automatic sequence with motor valves

                                                                                                                                                        Vacuum gauge          : Pirani gauge

                                                                                                                                                        Ultimate vacuum       : 1.5 x 10-3 Pa

                                                                                                                                                        Adjustable pressure range: 6 – 270 Pa (inlow vacuum mode only)

                                                                                                                                                        Vacuum pump           :Turbo Molecular Pump(TMP) 210 l/s, 1 Oil Rotary Pump 135 l/min.(50Hz), 162 l/min.(60Hz),  1

                                                                                                                                                         

                                                                                                                                                         

                                                                                                                                                        (5)  Display

                                                                                                                                                        Control               :Graphic User Interface(GUI), English menu

                                                                                                                                                        OS                    :Microsoft® Windows® XP Professional

                                                                                                                                                        Operation             :Mouse/Keyboard, Rotary knob set(option)

                                                                                                                                                        Monitor               :19 type LCD (1280 1024 pixels on desk top)

                                                                                                                                                        Image display mode    : Full screen display (1280 ′ 960 pixels)
                                                                                                                                                        Standard display (640
                                                                                                                                                        ′480 pixels)
                                                                                                                                                        Dual image display (640 ′480 pixels 2), Signal mixing

                                                                                                                                                        Scanning mode         : TV/FAST

                                                                                                                                                                              :Slow

                                                                                                                                                                              :Reduced area (320 240 pixels)

                                                                                                                                                                              :Waveform

                                                                                                                                                                              :Split screen/Dual magnification

                                                                                                                                                                              :High definition image capture (max. 2560 ′ 1920 pixels)

                                                                                                                                                                              :Frame integration image capture (max. 2560 ′ 1920 pixels)


                                                                                                                                                        Scanning speed        : TV scan
                                                                                                                                                        (640 480 pixels, 25/30* frames/sec.)

                                                                                                                                                                              :FAST scan
                                                                                                                                                        (full screen display: 6.3/7.5* frames/sec.)

                                                                                                                                                                              :Slow scan
                                                                                                                                                        (full screen display: 1, 4, 20/16, 40/32, 80/64* sec./frame)
                                                                                                                                                        (640 480 pixels: 0.5, 2, 10/8, 20/16, 40/32*sec./frame)

                                                                                                                                                                              :Reduced area scan
                                                                                                                                                        (320 240 pixels: 25/30,3/4* frame/sec.)
                                                                                                                                                        * Frequency of power supply: 50/60Hz

                                                                                                                                                        Automatic adjustment functions

                                                                                                                                                                              :Automatic Brightness & Contrast (ABCC)

                                                                                                                                                                              :Automatic Focus Control (AFC)

                                                                                                                                                                              :Automatic Stigmator & Focus (ASF)

                                                                                                                                                                              :Automatic Filament Saturation (AFS)

                                                                                                                                                                              :Automatic Beam Alignment (ABA)

                                                                                                                                                                              :Automatic Beam Setting (ABS)
                                                                                                                                                        (AFS + ABA + Automatic Gun Bias) 

                                                                                                                                                        Signal and image processing functions

                                                                                                                                                                              :Improving S/N ratio by averaging (TV, FAST scan)

                                                                                                                                                                              :Improving S/N ratio by pixel integration

                                                                                                                                                                              :Improving S/N ratio by frame integration
                                                                                                                                                        (maximum frames for integration: 1024)(TV, FAST, SLOW1)

                                                                                                                                                                              :Composite bi-color image display
                                                                                                                                                        (Real time on dual image display mode/Save image)

                                                                                                                                                                              :Pseudo color display(Save image)

                                                                                                                                                                              :Real time image processing
                                                                                                                                                        (Reversed contrast, Gamma control)

                                                                                                                                                                              :Real time histogram display

                                                                                                                                                                              :Image processing for save image
                                                                                                                                                        (Reversed contrast, Gamma control, Smoothing, Edge enhancement, etc.)

                                                                                                                                                        Image saving          : Image saving size
                                                                                                                                                        (640 480 pixels, 1280 ′ 960 pixels, 2560 ′1920 pixels, 5120 3840 pixels)

                                                                                                                                                                              :Image filing format: BMP, TIFF, JPEG

                                                                                                                                                        Image print out       : Free layout print function in standard


                                                                                                                                                        Management of save image

                                                                                                                                                                              :SEM data manager (Image data base) in standard
                                                                                                                                                        (Data management, Thumbnail display, various image processing functions)

                                                                                                                                                        Other functions       : Beam blanking when an image is frozen.

                                                                                                                                                                              :Raster rotation

                                                                                                                                                                              :Dynamic focus/Tilt compensation

                                                                                                                                                                              :Data display (Image number, Accelerating voltage, Magnification, Micron marker,Unit, WD, Date, Time, Pressure, Detector)
                                                                                                                                                        Data display selectable between with and without image

                                                                                                                                                                              :Data entry[Figures (circle, rectangular, arrow, measurement line),characters

                                                                                                                                                                              :Easy measurement function (distance between 2 points, and measurement lineswith arrow)

                                                                                                                                                                              :3D Animation Maintenance Guide

                                                                                                                                                                              :Image transfer to Quartz Imaging PCI

                                                                                                                                                        X-Ray mode function   : Input signal terminals for X-Ray Rate-meter(0 - +10V) andMapping(TTL)

                                                                                                                                                                              :Scanning mode (Line analysis, Spot analysis, Average concentration analysis)

                                                                                                                                                                              :DBC interface (option)

                                                                                                                                                        Connection port for external equipment

                                                                                                                                                                              :USB interface

                                                                                                                                                                              :Network interface (Ethernet), Setting up is at option.

                                                                                                                                                        VTR signal            :NTSC black and white signal only(BNC), an image in standard display mode only.

                                                                                                                                                         

                                                                                                                                                        (6)    Safety device

                                                                                                                                                                              :Protected against power failure, leakage current and vacuum failure.

                                                                                                                                                         

                                                                                                                                                        (7)  Dimensionand weight

                                                                                                                                                         

                                                                                                                                                        Item

                                                                                                                                                        Dimension

                                                                                                                                                        Weight

                                                                                                                                                        Main unit

                                                                                                                                                        550(W) x 1000(D) x 1460(H) mm

                                                                                                                                                        380 kg

                                                                                                                                                        Oil rotary pump

                                                                                                                                                        526(W) x 225(D) x 306(H) mm

                                                                                                                                                        28 kg

                                                                                                                                                        Weight

                                                                                                                                                        200(W) x 180(D) x 160(H) mm

                                                                                                                                                        40 kg


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